“Low refraction properties of F-doped SiOC:H thin films prepared by PECVD“
- Journal
- Thin Solid Films
- Volume, Page (Number)
- Vol. 516, Issue 7, p1410-1413, Feb. 15
- Year
- 2008
- Memo
Vol. 516, Issue 7, p1410-1413, Feb. 15 (2008)
- File
- 50.pdf (744.7K) 0회 다운로드 DATE : 2023-05-03 15:04:56