“Effect of assist ion beam voltage on intrinsic stress and optical properties of Ta2O5 thin films deposited by dual ion beam sputtering“

Journal

Thin Solid Films

Author

S. G. Yoon, S. M. Kang, W. S. Jung, S.-W. Kim, and D. H. Yoon

Volume, Page (Number)

Vol. 516, Issue 11, p3582-3585

Year

2008

File

51.pdf (691.8K) 1회 다운로드 DATE : 2023-05-03 15:05:52

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