Publication Energy Harvesting Laboratory

Publication

“Dry etch damage in n-type GaN and its recovery by treatment with an N2 plasma“
Journal
J. Appl. Phys
Author
J.-M. Lee, K.-M. Chang, S.-W. Kim, C. Huh, I.-H. Lee, and S.-J. Park
Volume, Page (Number)
87, 7667
Year
2008~
Memo

 87, 7667 (2000) 

File
4.pdf (184.8K) 1회 다운로드 DATE : 2023-05-03 15:40:21