Publication Energy Harvesting Laboratory

Publication

"Dry etch of GaN/InGaN multi-quantum wells using inductively coupled Cl2/CH4/H2/Ar plasma“
Journal
J. Electrochem. Soc
Author
J.-M. Lee, S.-W. Kim, and S.-J. Park
Volume, Page (Number)
148, G254
Year
2008~
File
7.pdf (143.8K) 1회 다운로드 DATE : 2023-05-03 15:42:50